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型號(hào)泵型號(hào)抽氣速率極限壓力電機(jī)功率
主泵前級(jí)泵主泵前級(jí)泵
L/sPaTorr
JZPS30-1PZJP30PQ-1.5/SK1.5B30400.30.754
JZPS70-1PZJP70PQ-3/2SK370400.31.17.5
JZPS150-1PZJP150PQ-6/2SK6A150400.32.211
JZPS30-1PZJP300PQ-12/SKA12300400.3422
JZPS70-1PZJP70PQ-6/2SK6A70400.31.111
JZPS150-1PZJP150PQ-12/SKA12150400.32.222
JZPS300-1PZJP300PQ-25/SKA25300400.3437
JZPS150-3PZJP150PQ-3/2SK3150400.3.2.27.5
JZPS300-3PZJP300PQ-3/2SK6300400.3411
JZPS600-3PZJP600PQ-12/SKA12600400.37.522
JZPS1200-3PZJP1200APQ-25/SKA251200400.31137
JZPS70-21PZJP70ZJP30PQ-1.5/SK1.5B7021.5*10-21.11.14
JZPS150-21PZJP150ZJP70PQ-3/2SK315021.5*10-22.21.17.5
JZPS300-21PZJP300ZJPPQ-6/2SK6A30021.5*10-242.211
JZPS600-21PZJP600ZJP150PQ-12/SKA1260021.5*10-27.5422
JZPS1200-21PZJP1200AZJP300PQ-25/SKA25120021.5*10-2117.537
JZPS150-21PZJP150ZJP600PQ-6/2SK6A15021.5*10-22.21.111
JZPS300-21PZJP300ZJP70PQ-12/SKA1230021.5*10-242.222
JZPS600-21PZJP600ZJP150PQ-25/SKA2560021.5*10-27.5437
JZPS300-41PZJP300ZJP300PQ-3/2SK330021.5*10-241.17.5
JZPS600-41PZJP300ZJP600PQ-6/2SK6A60021.5*10-27.52.211
JZPS1200-41PZJP1200AZJP70PQ-12/SKA12120021.5*10-211422


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